Acoustic wave device with transverse spurious mode suppression

ABSTRACT

An acoustic wave device with a bent section is disclosed. The acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer. The bent section is arranged to create a curvature in a waveguide of the acoustic wave device to suppress a transverse spurious mode of the acoustic wave device.

CROSS REFERENCE TO PRIORITY APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/700,947, filed Dec. 2, 2019 and titled “ACOUSTIC WAVE DEVICE WITHTRANSVERSE SPURIOUS MODE SUPPRESSION,” the disclosure of which is herebyincorporated by reference in its entirety herein. U.S. patentapplication Ser. No. 16/700,947 claims the benefit of priority of U.S.Provisional Patent Application No. 62/774,734, filed Dec. 3, 2018 andtitled “ACOUSTIC WAVE RESONATOR WITH TRANSVERSE SPURIOUS MODESUPPRESSION,” the disclosure of which is hereby incorporated byreference in its entirety herein. U.S. patent application Ser. No.16/700,947 claims the benefit of priority of U.S. Provisional PatentApplication No. 62/774,762, filed Dec. 3, 2018 and titled “ACOUSTIC WAVERESONATOR WITH BENT SECTION,” the disclosure of which is herebyincorporated by reference in its entirety herein.

BACKGROUND Technical Field

Embodiments of this disclosure relate to acoustic wave devices.

Description of Related Technology

Acoustic wave filters can be implemented in radio frequency electronicsystems. For instance, filters in a radio frequency front end of amobile phone can include acoustic wave filters. An acoustic wave filtercan be a band pass filter. A plurality of acoustic wave filters can bearranged as a multiplexer. For example, two acoustic wave filters can bearranged as a duplexer.

An acoustic wave filter can include a plurality of resonators arrangedto filter a radio frequency signal. Example acoustic wave filtersinclude surface acoustic wave (SAW) filters and bulk acoustic wave (BAW)filters. A surface acoustic wave resonator can include an interdigitaltransductor electrode on a piezoelectric substrate. The surface acousticwave resonator can generate a surface acoustic wave on a surface of thepiezoelectric layer on which the interdigital transductor electrode isdisposed.

Certain surface acoustic wave resonators can operate with transversespurious modes. Suppressing transverse spurious modes can be desirable.

SUMMARY OF CERTAIN INVENTIVE ASPECTS

The innovations described in the claims each have several aspects, nosingle one of which is solely responsible for its desirable attributes.Without limiting the scope of the claims, some prominent features ofthis disclosure will now be briefly described.

One aspect of this disclosure is an acoustic wave device that includes apiezoelectric layer and an interdigital transducer electrode on thepiezoelectric layer. The interdigital transducer electrode includes abent section arranged to create a curvature in a waveguide of theacoustic wave device to suppress a transverse spurious mode of theacoustic wave device.

The bent section can have a bend angle in a range from 1° to 20°. Insome of these instances, the bent section can have a bend angle in arange from 10° to 20°. The acoustic wave device can further include apiston mode structure arranged to create a slow velocity boundary regionof the acoustic wave device.

The acoustic wave device can include a temperature compensation layerover the interdigital transducer electrode. The acoustic wave device canbe a temperature compensated surface acoustic wave resonator configureto generate a surface acoustic wave.

The interdigital transducer electrode can include a bus bar thatconsists essentially of an arcuate section.

The interdigital transducer electrode can include a bus bar, in whichthe bus bar includes an arcuate section and a straight section.

Another aspect of this disclosure is an acoustic wave device thatincludes a piezoelectric layer and an interdigital transducer electrodeon the piezoelectric layer. The interdigital transducer electrodeincludes a bus bar and fingers extending from the bus bar. The bus barincludes an arcuate section. The interdigital transducer electrode isconfigured to suppress a transverse spurious mode of the acoustic wavedevice.

The arcuate section can have a bend angle in a range from 1° to 20°. Thearcuate section can have a bend angle in a range from 10° to 20°.

The bus bar can consist essentially of the arcuate section. The bus barcan include a straight section.

The acoustic wave device can further include a piston mode structurearranged to create a slow velocity boundary region of the acoustic wavedevice.

The acoustic wave device can further include a temperature compensationlayer over the interdigital transducer electrode. The acoustic wavedevice can further include a dispersion adjustment layer over thetemperature compensation layer.

The acoustic wave device can further include a carrier substrate, inwhich the piezoelectric layer is over the carrier substrate. In someinstances, the acoustic wave device can further include a dispersionadjustment layer positioned between the carrier substrate and thepiezoelectric layer. Alternatively or additionally, the acoustic wavedevice can include an overlying dispersion layer positioned over theinterdigital transducer electrode.

The acoustic wave device can be a surface acoustic wave resonatorconfigure to generate a surface acoustic wave.

Another aspect of this disclosure is an acoustic wave filter thatincludes an acoustic wave resonator including a piezoelectric layer andan interdigital transducer electrode on the piezoelectric layer. Theinterdigital transducer electrode includes a bus bar and fingersextending from the bus bar. The bus bar includes an arcuate section. Theacoustic wave filter also includes a plurality of additional acousticwave resonators. The acoustic wave resonator and the additional acousticwave resonators are together configured to filter a radio frequencysignal.

The acoustic wave resonator can be a shunt acoustic wave resonator. Theacoustic wave filter can be a band pass filter.

Another aspect of this disclosure is an acoustic wave device thatincludes a piezoelectric layer, an interdigital transducer electrode onthe piezoelectric layer, and a piston mode structure arranged to createa slow velocity boundary region of the acoustic wave resonator. Theinterdigital transducer electrode includes a bus bar and fingersextending from the bus bar. The bus bar includes an arcuate section. Theinterdigital transducer electrode is configured to suppress a transversespurious mode of the acoustic wave resonator. The slow velocity boundaryregion has a slower velocity than a central portion of an active regionof the acoustic wave device.

The arcuate section can have a bend angle in a range from 1° to 20°. Thearcuate section can have a bend angle in a range from 10° to 20°.

The bus bar can consist essentially of the arcuate section. The bus barcan include a straight section.

The acoustic wave device can further include a temperature compensationlayer over the interdigital transducer electrode. In some instances, theacoustic wave device can further includes a dispersion adjustment layerover the temperature compensation layer.

The acoustic wave device can further include a carrier substrate, thepiezoelectric layer being over the carrier substrate.

The acoustic wave device can further include a carrier substrate and adispersion adjustment layer, in which the dispersion adjustment layer ispositioned between the carrier substrate and the piezoelectric layer.The acoustic wave device can further include a second dispersionadjustment layer over the interdigital transducer electrode.

The acoustic wave device can further include a carrier substrate and adispersion adjustment layer, in which the piezoelectric layer is overthe carrier substrate and the dispersion adjustment layer is positionedover the interdigital transducer electrode.

The acoustic wave device can be a surface acoustic wave resonatorconfigure to generate a surface acoustic wave. In some instances, thesurface acoustic wave resonator can be a temperature compensated surfaceacoustic wave resonator.

The piston mode structure can include an end portion of a finger of thefingers, in which the end portion includes wider metal than otherportions of the finger. The piston mode structure can include an endportion of a finger of the fingers, in which the end portion includesthicker metal than other portions of the finger.

The piston mode structure can include an oxide over an end portion of afinger of the fingers.

The piston mode structure can include dispersion adjustment layer over acentral portion of an active region of the interdigital transducerelectrode, in which the dispersion adjustment layer is configured tocause a magnitude of a velocity in the central portion of the activeregion to be greater than the velocity in the boundary region of theacoustic wave device. The dispersion adjustment layer can be a siliconnitride layer. There can be a trench in the dispersion adjustment layerin the boundary region.

The piston mode structure can include a portion of a second bus bar ofthe interdigital transducer electrode having a lower metal coverageratio adjacent to an end portion of a finger of the fingers.

Another aspect of this disclosure is acoustic wave resonator thatincludes a piezoelectric layer, an interdigital transducer electrode onthe piezoelectric layer, and a piston mode structure arranged to createa slow velocity boundary region of the acoustic wave device. Theinterdigital transducer electrode includes a bent section arranged tocreate a curvature in a waveguide of the acoustic wave device to therebysuppress a transverse spurious mode of the acoustic wave device.

The bent section can have a bend angle in a range from 1° to 20°. Thebent section can have a bend angle in a range from 10° to 20°.

The acoustic wave device can include a temperature compensation layerover the interdigital transducer electrode. The acoustic wave device canbe a temperature compensated surface acoustic wave resonator configureto generate a surface acoustic wave.

The interdigital transducer electrode can include a bus bar thatconsists essentially of an arcuate section. The interdigital transducerelectrode can include a straight section.

The piston mode structure can include an end portion of a finger of thefingers, in which the end portion includes wider metal than otherportions of the finger. The piston mode structure can include an endportion of a finger of the fingers, in which the end portion includesthicker metal than other portions of the finger.

The piston mode structure can include an oxide over an end portion of afinger of the fingers.

The piston mode structure can include dispersion adjustment layer over acentral portion of an active region of the interdigital transducerelectrode, in which the dispersion adjustment layer is configured tocause a magnitude of a velocity in the central portion of the activeregion to be greater than the velocity in the boundary region of theacoustic wave device. The dispersion adjustment layer can be a siliconnitride layer. There can be a trench in the dispersion adjustment layerin the boundary region.

The piston mode structure can include a portion of a second bus bar ofthe interdigital transducer electrode having a lower metal coverageratio adjacent to an end portion of a finger of the fingers.

The acoustic wave resonator of claim 14 wherein the piston modestructure includes a portion of a second bus bar of the interdigitaltransducer electrode having a lower metal coverage ratio adjacent to anend portion of a finger of the interdigital transducer electrode.

Another aspect of this disclosure is an acoustic wave filter thatincludes acoustic wave resonators. The acoustic wave resonators includean acoustic wave resonator in accordance with any suitable principlesand advantages disclosed herein. The acoustic wave filter is configuredto filter a radio frequency signal.

The acoustic wave resonator can be a shunt acoustic wave resonator. Theacoustic wave filter can be a band pass filter.

The acoustic wave filter can be included in a wireless communicationdevice that also includes an antenna in communication with the acousticwave filter.

Another aspect to this disclosure is a method of filtering a radiofrequency signal. The method includes providing the radio frequencysignal to an acoustic wave filter that includes a bent acoustic waveresonator. The method includes filtering the radio frequency signal withthe acoustic wave filter. The method also includes during the filtering,suppressing a transverse spurious mode of the bent acoustic waveresonator. The bent acoustic wave resonator includes a bent sectionarranged to create a curvature in a waveguide of the bent acoustic waveresonator to thereby suppress the transverse spurious mode.

For purposes of summarizing the disclosure, certain aspects, advantagesand novel features of the innovations have been described herein. It isto be understood that not necessarily all such advantages may beachieved in accordance with any particular embodiment. Thus, theinnovations may be embodied or carried out in a manner that achieves oroptimizes one advantage or group of advantages as taught herein withoutnecessarily achieving other advantages as may be taught or suggestedherein.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of this disclosure will now be described, by way ofnon-limiting example, with reference to the accompanying drawings.

FIG. 1 illustrates an acoustic wave resonator according to anembodiment.

FIG. 2 illustrates a layout of the acoustic wave resonator according toan embodiment

FIG. 3 illustrates a layout of an acoustic wave resonator according toanother embodiment.

FIG. 4 is a graph of conductance curves of acoustic wave resonatorsaccording to embodiments relative to a baseline acoustic wave resonator.

FIG. 5 is a graph of quality factor of acoustic wave resonatorsaccording to embodiments relative to a baseline acoustic wave resonator.

FIG. 6 is a graph comparing conductance curve of an acoustic waveresonator with piston mode to an acoustic wave resonator with pistonmode according to an embodiment.

FIG. 7 is a graph comparing quality factor of an acoustic wave resonatorwith piston mode to an acoustic wave resonator with a piston modetechnique according to an embodiment.

FIG. 8 includes graphs of measured insertion loss for Long TermEvolution band 39 for (a) an acoustic wave resonator with piston modeaccording to an embodiment compared to an acoustic wave resonatorwithout any transverse mode suppression technique and (b) an acousticwave resonator with piston mode according to an embodiment compared toan acoustic wave resonator with a piston mode technique.

FIG. 9 includes graphs of measured rejection for Long Term Evolutionband 39 for (a) an acoustic wave resonator with piston mode according toan embodiment compared to an acoustic wave resonator without anytransverse mode suppression technique and (b) an acoustic wave resonatorwith piston mode according to an embodiment compared to an acoustic waveresonator with a piston mode technique.

FIG. 10 illustrates an acoustic wave resonator according to anotherembodiment.

FIG. 11 illustrates an acoustic wave resonator according to anotherembodiment.

FIGS. 12A to 12J are diagrams of interdigital transducer (IDT)electrodes of acoustic wave resonators with a piston mode structureaccording to various embodiments. FIG. 12A illustrates an IDT electrodewith fingers having hammer head shaped end portions. FIG. 12Billustrates an IDT electrode with thicker portions for both borderregions of each finger. FIG. 12C illustrates an IDT electrode withfingers having hammer head shaped end portions and bus bars havingextension portions adjacent to the end portions of the fingers. FIG. 12Dillustrates an IDT electrode with thicker end portions on border regionsof each finger and bus bars having extension portions adjacent to endportions of the fingers. FIG. 12E illustrates an IDT electrode withfingers having thicker end portions and thicker regions extending from abas bar toward a central portion of an active region. FIG. 12Fillustrates an IDT electrode with bus bars having holes. FIG. 12Gillustrates another IDT electrode with bus bars having holes. FIG. 12Hillustrates an IDT electrode with fingers having thicker metal on bothborder regions. FIG. 12I illustrates an IDT electrode with fingershaving an oxide over border regions. FIG. 12J illustrates an IDTelectrode with fingers having silicon nitride over a central portion ofan active region and border regions free from silicon nitride.

FIG. 13 is a cross sectional view of a portion of a surface acousticwave resonator according to an embodiment.

FIG. 14A is a cross sectional view of a portion of a temperaturecompensated surface acoustic wave resonator according to an embodiment.

FIG. 14B is a cross sectional view of a portion of a temperaturecompensated surface acoustic wave resonator according to anotherembodiment.

FIG. 15A is a cross sectional view of a portion of a surface acousticwave resonator with a multi-layer piezoelectric substrate according toan embodiment.

FIG. 15B is a cross sectional view of a portion of a surface acousticwave resonator with a multi-layer piezoelectric substrate according toanother embodiment.

FIG. 15C is a cross sectional view of a portion of a surface acousticwave resonator with a multi-layer piezoelectric substrate according toanother embodiment.

FIG. 15D is a cross sectional view of a portion of a surface acousticwave resonator with a multi-layer piezoelectric substrate according toanother embodiment.

FIGS. 16A to 16F are diagrams of cross sections of Lamb wave resonatorswith gratings. FIG. 16A illustrates a Lamb wave resonator with agrounded electrode. FIG. 16B illustrates a Lamb wave resonator with afloating electrode. FIG. 16C illustrates a Lamb wave resonator withoutan electrode on a side of a piezoelectric layer that opposes aninterdigital transducer (IDT) electrode. FIG. 16D illustrates anotherLamb wave resonator. FIG. 16E illustrates another Lamb wave resonator.FIG. 16F illustrates another Lamb wave resonator.

FIGS. 17A to 17F are diagrams of cross sections of Lamb wave resonatorswith free edges. FIG. 17A illustrates a Lamb wave resonator with agrounded electrode. FIG. 17B illustrates a Lamb wave resonator with afloating electrode. FIG. 17C illustrates a Lamb wave resonator withoutan electrode on a side of a piezoelectric layer that opposes an IDTelectrode. FIG. 17D illustrates another Lamb wave resonator. FIG. 17Eillustrates another Lamb wave resonator. FIG. 17F illustrates anotherLamb wave resonator.

FIG. 18 is a schematic diagram of a transmit filter that includes anacoustic wave resonator according to an embodiment.

FIG. 19 is a schematic diagram of a receive filter that includes anacoustic wave resonator according to an embodiment.

FIG. 20 is a schematic diagram of a radio frequency module that includesan acoustic wave device according to an embodiment.

FIG. 21 is a schematic diagram of a radio frequency module that includesan acoustic wave component according to an embodiment.

FIG. 22A is a schematic block diagram of a wireless communication devicethat includes a filter in accordance with one or more embodiments.

FIG. 22B is a schematic block diagram of another wireless communicationdevice that includes a filter in accordance with one or moreembodiments.

DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS

The following description of certain embodiments presents variousdescriptions of specific embodiments. However, the innovations describedherein can be embodied in a multitude of different ways, for example, asdefined and covered by the claims. In this description, reference ismade to the drawings where like reference numerals can indicateidentical or functionally similar elements. It will be understood thatelements illustrated in the figures are not necessarily drawn to scale.Moreover, it will be understood that certain embodiments can includemore elements than illustrated in a drawing and/or a subset of theelements illustrated in a drawing. Further, some embodiments canincorporate any suitable combination of features from two or moredrawings.

With the explosive growth of mobile communication, the frequencyspectrum is becoming crowded. This can generate demanding specificationsfor radio frequency (RF) filters and duplexers with steep roll-off, lowtemperature drift, low insertion loss, miniature size, the like, or anycombination thereof. Bulk acoustic wave (BAW) filters can include a filmbulk acoustic resonator (FBAR) filters and/or a solidly mountedresonator (SMR). Such BAW filters can fulfill the demandingspecifications for RF filters in certain applications. Surface acousticwave (SAW) filters typically have higher frequency drift overtemperature. Such SAW filters may encounter difficulty in meetingstringent filter specifications. However, BAW filters are generally moreexpensive and larger in size than SAW filters.

Temperature-compensated surface acoustic wave (TC-SAW) filters canovercome the frequency drift over temperature of certain SAW filters.Such TC-SAW filters can combine a piezoelectric layer and a low thermalexpansion layer together to achieve low temperature drift operation.TC-SAW structures include (1) lithium tantalate (LT) onsapphire/silicon/or other crystal substrates or (2) silicon dioxide(SiO₂) on lithium niobate (LN). The TC-SAW structures that include LT onsapphire/silicon or other crystal substrates can be referred to asmulti-layer piezoelectric substrate acoustic wave resonator, where alayer of LT is bonded on sapphire/silicon and thinned down to sub-micronthickness. The price related to bonding, thinning and thickness controlremains an issue for mass production for this type of filter. OtherTC-SAW structures include silicon dioxide that coats over interdigitaltransducer electrode fingers on an LN substrate, such as a 128° YX-cutLN substrate. The silicon dioxide layer can compensate for therelatively large temperature coefficient of frequency (TCF) of the LNsubstrate.

TC-SAW resonators typically operate with a main resonance mode togetherwith transverse modes. TC-SAW filter typically utilize the mainresonance mode of each of the resonators of the filter to construct anRF passband and rejection band. Transverse modes in TC-SAW resonatorsare typically unwanted for filters and transverse modes can appear asspurious modes in the passband of a filter. Spurious modes in thepassband increase the noise figure of the filter and cause overallsystem performance degradation.

TC-SAW filters can be used in RF front-end module products for premiumhandsets of top tier cellular phone makers. Such TC-SAW filters can havelow insertion loss, high rejection level, steep roll-off, and low TCF.However, the layered structure of such TC-SAW resonators can generaterelatively strong transverse modes in a resonator waveguide and thetransverse modes can appear in a passband of a filter as frequencyripples, causing higher passband loss and/or lower manufacture yields.

In a traditional 128° YX cut LN TC-SAW resonator, the resonator isstraight. The acoustic wave is generated by the interdigital transducer(IDT) fingers and the main wave motion is Rayleigh wave. Due to theslowness curve in the propagation direction, transverse modes can begenerated in the acoustic waveguide.

Aspects of this disclosure relate to reducing the impact of transversespurious modes by bending a TC-SAW resonator waveguide to leak out thetransverse modes. Based on the fact that higher waveguide modes havelarger bending loss than fundamental mode, a bent resonator can be usedto suppress transverse mode in the resonator waveguide. According towaveguide theory, higher mode has a higher oblique incidence angle.

The incident angle can be relatively close to a Snell angle at theboundary. With a relatively small bending angle, the fundamental modecan encounter insignificant loss while higher transverse mode encountershigher loss. Bent acoustic wave resonators disclosed herein can modifythe boundary condition for transverse mode to achieve transverse modesuppression. The bent resonators disclosed herein can be used togetherwith piston mode operation. Accordingly, piston mode operation togetherwith a bent resonator can provide desirable transverse mode suppressionand also to ease the control of the slow velocity region in the pistonmode structure and the center frequency of the resonator. Experimentalresults show the effectiveness of transverse mode suppression modetechniques disclosed herein.

Acoustic wave filters can filter RF signals in a variety ofapplications, such as in an RF front end of a mobile phone. An acousticwave filter can be implemented with one or more SAW devices. SAW devicesinclude SAW resonators, SAW delay lines, and multi-mode SAW (MMS)filters (e.g., double-mode SAW (DMS) filters). Although embodiments maybe discussed with reference to SAW resonators and/or TC-SAW resonators,the principles and advantages discussed herein can be applied to anysuitable SAW device and/or any other suitable acoustic wave device.

In embodiments disclosed herein, acoustic wave resonators include a bentacoustic resonator waveguide. FIG. 1 illustrates a SAW resonator 10according to an embodiment. The SAW resonator 10 is shown in plan viewin FIG. 1. Curvature in a waveguide of the SAW resonator 10 can suppressa transverse spurious mode of the SAW resonator 10. As illustrated, theSAW resonator 10 includes IDT electrode 12 and acoustic reflectors 14Aand 14B. The acoustic reflectors 14A and 14B are separated from the IDTelectrode 12 by respective gaps 15A and 15B. The IDT electrode 12includes a first bus bar 16, first IDT fingers 17 extending from thefirst bus bar 16, a second bus bar 18, and second IDT fingers 19extending from the second bus bar 18. The first bus bar 16 is curved orarcuate. Similarly, the second bus bar 18 is curved or arcuate. The IDTfingers 17 are shown as being parallel to each other. The IDT fingers 17can have substantially the same length as each other.

The SAW resonator 10 is illustrated as being bent. The SAW resonator 10has a bending angle of θ. The bending angle θ in FIG. 1 is the anglebetween intersecting lines extending from outer edges of outer IDTfingers 17A and 19A of the IDT electrode 12. The bending angle θ isshown off scale in FIG. 1. In FIG. 1, the bending angle θ is an acuteangle. A curvature radius of the SAW resonator 10 can be the shortestdistance between an outer IDT finger 17A or 19A of the IDT electrode 12and the intersection point where the lines extending from outer IDTfingers 17A and 19A along the longitudinal direction of outer IDTfingers 17A and 19A, respectively, intersect. The dashed lines in FIG. 1do not illustrate the curvature radius to scale, as the dashed lines donot extend along a longitudinal direction of outer IDT fingers 17A and19A. Instead, the dashed lines are intended to show that such lineswould intersect at the bending angle θ. The bending angle θ in radianscan be defined as the length of the resonator IDT region divided by thecurvature radius. In FIG. 1, the length of the IDT region can be definedas the length between outer fingers 17A and 19A of the IDT electrode 12.

Acoustic wave and transverse modes can be generated by IDT fingers 17and 19. However, the boundary condition for each mode has changedrelative to a resonator with a 0 bend angle. For a different mode, theFresnel transmission coefficient (T) at the boundary can be representedby:

$\begin{matrix}{{T(\theta)} = {\frac{1}{{\pi\theta}_{c}}\left( \frac{2}{\kappa\rho} \right)^{1/3}{{{Ai}\left( {{\Delta exp}\left( {2{\pi/3}} \right)} \right.}^{- 2}}}} & (1) \\{\Delta = {{- \left( \frac{\kappa\rho}{2} \right)^{\frac{2}{3}}}\left( {\theta_{c}^{2} - \theta_{t}^{2}} \right)}} & (2)\end{matrix}$

In these equations, θc is the complement of the critical angle, κ is thewave vector, θt=(π/2)−θn, where θn is the inclination to the normal. Themodulus of the Airy function decreases with increase argument. FromEquations (1) and (2), it can be known that when the acoustic wave hitsthe resonator waveguide boundary, there can be radiation loss due to thetransmission coefficient. When the boundary has a curvature, theradiation loss should be higher. The radiation loss can be higher withsmaller curvature radius. Also, the higher mode can have a smallerinclination angle to the normal and can be closer to the critical angle.The higher mode can encounter higher bending loss than the fundamentalmode does. In this case when the SAW resonator is bent, the fundamentalmode can still be guided while the higher transverse modes are leakedout due to the increase in radiation loss.

Compared to other transverse mode suppression techniques, the bentresonator can be implemented by layout changes only without any additionfabrication steps. The bent resonator method can be better thanelectrode apodization, because apodization typically reduces effectivecoupling due to the reduction of the TC-SAW aperture at the resonatoredges.

Bent TC-SAW resonators and filters including the same can bemanufactured using a standard TC-SAW manufacturing process. Thesubstrate of the wafer can be a 128° YX cut lithium niobate (128YX-LN)substrate. The IDT can be formed and then coated with a temperaturecompensation layer, such as a silicon dioxide layer.

FIG. 2 illustrates a layout of a bent SAW resonator 20 according to anembodiment. As illustrated, the SAW resonator 20 includes IDT electrode22 and acoustic reflectors 24A and 24B. The IDT electrode 22 includes afirst bus bar 26, first IDT fingers 27 extending from the first bus bar26, a second bus bar 28, and second IDT fingers 29 extending from thesecond bus bar 28. The first bus bar 26 is curved or arcuate. Similarly,the second bus bar 28 is curved or arcuate. The resonator waveguide ofthe SAW resonator 20 is bent. The curvature in a waveguide of the SAWresonator 20 can suppress a transverse spurious mode of the SAWresonator 20. The SAW resonator 20 has a relatively small bending angle.This can result in insignificant loss in fundamental mode and higherloss in transverse mode. Accordingly, the SAW resonator 20 can suppresstransverse mode and maintain desirable performance for fundamental mode.

Bent acoustic wave resonators can also implement piston mode operation.FIG. 3 illustrates a layout of a bent SAW resonator 30 with a pistonmode structure according to an embodiment. The illustrated SAW resonator30 includes piston mode structures 31A and 31B, IDT electrode 32 andacoustic reflectors 34A and 34B. The piston mode structures 31A and 31Bcan create slower velocity regions on edges of an acoustic aperture ofthe SAW resonator 30. The slower velocity regions can suppresstransverse modes. Example piston mode structures will be discussed withreference to FIGS. 12A to 12J.

In FIG. 3, the piston mode structures 31A and 31B can include a trenchin a material, such as silicon nitride that increases velocity in anunderlying border region over portions of IDT electrode fingers adjacentto the bus bars. Alternatively, the piston mode structures 31A and 31Bcan include a material, such as an oxide, that reduces velocity in anunderlying border region over potions of IDT fingers adjacent to the busbars.

The IDT electrode 32 includes a first bus bar 36, first IDT fingers 37extending from the first bus bar 36, a second bus bar 38, and second IDTfingers 39 extending from the second bus bar 38. The first bus bar 36 iscurved or arcuate. Similarly, the second bus bar 38 is curved orarcuate. The resonator waveguide of the SAW resonator 20 is bent. TheSAW resonator 20 has a relatively small bending angle. This can resultin insignificant loss in fundamental mode and higher loss in transversemode. Accordingly, the SAW resonator 20 can suppress transverse mode andmaintain desirable performance for fundamental mode.

FIG. 4 is a graph of conductance of TC-SAW resonators with differentbend angles according to embodiments relative to a straight TC-SAWresonator. The curves in this graph illustrate that transverse spuriousmodes can be significant between series resonance frequency (fs) andparallel resonance frequency (fp) in the straight TC-SAW resonator curveof FIG. 4. In a filter, the transverse spurious modes can becomefrequency ripples in the passband of the filter. The transverse spuriousmodes outside fs and fp can appear in the filter rejection frequencyrange and may cause spikes in duplexer isolation. In the bent resonatorstructure, as the bending angle is increased, the transverse spuriousmode level greatly reduces as indicated by the 20° and 40° curves ofFIG. 4. FIG. 4 illustrates that bent acoustic wave resonators cansuppress transverse mode.

FIG. 5 is a graph of quality factor (Q) of TC-SAW resonators withdifferent bend angles according to embodiments relative to a straightTC-SAW resonator. As illustrated by the Q curves, if the bending angleis greater than 20°, the Q of the resonator can start to decreaserapidly. This can be due to the main mode starting to experiencesignificant radiation loss. If the bending angle is less than or equalto about 20°, the transverse mode can be suppressed while the Q of theresonator is preserved. Accordingly, it can be desirable for an acousticwave resonator to have a bend angle that is greater than 0° and lessthan or equal to 20°. In some instances, it can be desirable for anacoustic wave resonator to have a bend angle is a range from about 10°to 20°.

Piston mode techniques can be applied in combination with bent resonatortechniques to reduce transverse spurious modes. FIG. 6 is a graphcomparing conductance of an acoustic wave resonator with piston mode toan acoustic wave resonator with a bent resonator and piston modeaccording to an embodiment. FIG. 6 indicates that a resonator withpiston mode only may only partially remove transverse modes. Bycombining the bent resonator structure with a 20° bending angle andpiston mode, the transverse modes can be completely (or almostcompletely) removed. The piston mode transverse suppression techniquecorresponding to this graph is based on selectively etching a siliconnitride layer at the resonator edge to create a velocity difference onthe IDT region and the edge region to suppress the excitation oftransverse modes. Cross-wafer variation of the etching trench can causethe degree of suppression to vary. The bent resonators should not havesuch a problem because the suppression level due to bending can dependon the bending angle, which can be reliably manufactured.

FIG. 7 is a graph comparing quality factor of an acoustic wave resonatorwith piston mode to an acoustic wave resonator with a bent resonator andpiston mode according to an embodiment. This graph indicates that thequality factor is similar for the acoustic wave resonator with pistonmode and the acoustic wave resonator with a 20° bending angle and pistonmode. In FIG. 7, no significant loss is observed due to the bendingangle. Excitation efficiency is substantially the same for the acousticwave resonators corresponding to the curves illustrated in FIG. 7.

FIG. 8 includes graphs of measured insertion loss for Long TermEvolution band 39 for (a) an acoustic wave filter with piston modeaccording to an embodiment compared to an acoustic wave filter withoutany transverse mode suppression technique and (b) an acoustic wavefilter with piston mode according to an embodiment compared to anacoustic wave filter with a piston mode technique. FIG. 8 shows themeasured insertion loss of an LTE band 39 filter.

The top portion of FIG. 8 shows the insertion loss difference between(1) a filter with a bent resonator structure and a piston modesuppression technique and (2) a corresponding filter without anytransverse mode suppression. The passband ripples can cause significantperformance degradation if there is no transverse mode suppression.

The bottom portion of FIG. 8 shows the performance difference between(1) a filter with a bent resonator structure together with a piston modetechnique and (2) a corresponding filter with a reference techniquewhich is only the piston mode technique. This graph indicates that thepiston mode technique does not completely remove transverse spuriousmodes, but the bent resonator structure with piston mode can furtherremove ripples. The bent resonator structure with piston mode can removethe ripples completely or almost completely as shown in FIG. 8.

FIG. 9 includes graphs of measured rejection for Long Term Evolutionband 39 for (a) an acoustic wave filter with piston mode according to anembodiment compared to an acoustic wave filter without any transversemode suppression technique and (b) an acoustic wave filter with pistonmode according to an embodiment compared to an acoustic wave filter witha reference technique which is only a piston mode technique. FIG. 9shows the rejection level of LTE band 39 filters. This figureillustrates that spikes can also be removed outside the passband usingthe bent resonator structure.

Accordingly, measurement results indicate that bent acoustic waveresonators can better suppress transverse mode than baseline acousticwave resonators. No significant insertion loss or bandwidth degradationis observed due to the bending of the bent acoustic wave resonator.Depending on the implementation, the physical area of a filter canincrease slightly due to implementing bent resonators.

Bent resonators can be substantially arcuate or curved. For example, theacoustic wave resonators of FIGS. 1 to 3 include bus bars that consistessentially of an arcuate section. Transverse mode suppression can berealized in acoustic wave resonators in which only a portion of anacoustic aperture is curved and/or an acoustic aperture with two or morecurved portions. With at least a portion of the acoustic aperture beingcurved, transverse mode can be suppressed.

FIG. 10 illustrates an acoustic wave resonator 50 according to anembodiment. The acoustic wave resonator 50 has an acoustic aperture witha curved section and straight sections. The acoustic wave resonator 50is shown in plan view in FIG. 10. As illustrated, the acoustic waveresonator 50 includes IDT electrode 52 and acoustic reflectors 54A and54B. The acoustic reflectors 54A and 54B are separated from the IDTelectrode 52 by respective gaps. The IDT electrode 52 includes a firstbus bar 56, first IDT fingers 57 extending from the first bus bar 56, asecond bus bar 58, and second IDT finger 59 extending from the secondbus bar 58.

As shown in FIG. 10, the IDT electrode 52 includes a bent section 52-1and straight sections 52-2 and 52-3. The bent section 52-1 can suppresstransverse modes. The bent section 52-2 can alternatively be referred toas a curved section or an arcuate section. The bent section 52-2 has abending angle. The bending angle can be the angle between intersectinglines extending from outer edges of outer IDT fingers of the bentsection 52-1. The straight sections 52-2 and 52-3 do not have a bendingangle. Lines extending from edges of any two IDT fingers of the straightsection 52-2 should be substantially parallel to each other. Similarly,lines extending from edges of any two IDT fingers of the straightsection 52-2 should be substantially parallel to each other.

FIG. 11 illustrates an acoustic wave resonator 60 according to anembodiment. The acoustic wave resonator 60 has an acoustic aperture witha plurality of curved sections. The acoustic wave resonator 60 is shownin plan view in FIG. 11. As illustrated, the acoustic wave resonator 60includes IDT electrode 62 and acoustic reflectors 64A and 64B. Theacoustic reflectors 64A and 64B are separated from the IDT electrode 62by respective gaps. The IDT electrode 62 includes a first bus bar 66,first IDT fingers 67 extending from the first bus bar 66, a second busbar 68, and second IDT finger 69 extending from the second bus bar 68.

As shown in FIG. 11, the IDT electrode 62 includes a first bent section62-1 and a second bent section 62-2. The bent sections 62-1 and 62-2 cansuppress transverse modes. The bent sections each have a bending angle.The bending angle of a bent section can refer to the angle betweenintersecting lines extending from outer edges of outer IDT fingers of abent section.

As discussed above, a bent acoustic wave resonator can also include apiston mode structure. Piston mode structures can be implemented withany suitable acoustic wave resonator disclosed herein. Acoustic waveresonators with piston mode structures can be implemented a variety ofways. As an example, a metal layout of an interdigital transducerelectrode of an acoustic wave resonator can contribute to a velocity ina border region having a lower magnitude than a velocity in a centralportion of an active region. For instance, an end portion of aninterdigital transducer electrode finger can have wider metal than therest of the finger. Alternatively or additionally, a bus bar can have alower metal coverage ratio adjacent to an end portion of an interdigitaltransducer finger. As another example, a layer over an interdigitaltransducer electrode can contribute to a velocity in a border regionhaving a lower magnitude than a velocity in a central portion of anactive region. Such a layer can be over the central portion of theactive region to increase the magnitude of the velocity in the centralportion of the active region relative to the border region.Alternatively or additionally, a layer over the border region can reducethe velocity of the border region relative to the central portion of theactive region.

Example embodiments of acoustic wave resonators with a piston modestructure will be discussed with reference to FIGS. 12A to 12J. In theacoustic wave resonators of any of FIGS. 12A to 12J, an IDT electrodecan be included in any suitable acoustic wave resonator, such as a SAWresonator, a TC-SAW resonator, a multi-layer piezoelectric substrateacoustic wave resonator, a SAW delay line, a multi-mode SAW filter withlongitudinally coupled IDT electrodes, a Lamb wave resonator, or aboundary wave resonator. Any suitable principles and advantages of theseembodiments can be combined with each other. Any suitable principles andadvantages of the embodiments with a piston mode structure can beimplemented in a bent acoustic wave resonator in accordance with anysuitable features disclosed herein. Although a portion of an IDTelectrode is illustrated in FIGS. 12A to 12J, these IDT electrodes caninclude bus bars that include a curved and/or arcuate portion.

FIG. 12A illustrates a portion of an IDT electrode 70 of an acousticwave resonator according to an embodiment. The IDT electrode 70 includesfingers having hammer head shaped end portions. The IDT electrode 70includes bus bars 71 and 72 and a plurality of fingers extending fromthe bus bars 71 and 72. As illustrated, each of the fingers of the IDTelectrode 70 are substantially the same as each other. Finger 73 will bediscussed as an example. Finger 73 has a body portion 74 that extendsfrom bus bar 71 and an end portion 75. The end portion 75 is adjacent tothe bus bar 72. The end portion 75 is wider that the rest of the finger73. The end portion 75 is hammer head shaped in plan view. The endportions of the fingers of the IDT electrode 70 are piston modestructures.

FIG. 12B illustrates a portion of an IDT electrode 76 of an acousticwave resonator according to another embodiment. The IDT electrode 76includes fingers with thicker portions for both border regions of eachfinger. The IDT electrode 76 is like the IDT electrode 70 of FIG. 12Aexcept that the fingers of the IDT electrode 76 are wider adjacent toboth bus bars 71 and 72. Finger 77 will be discussed as an example.Finger 77 has a bus bar connection portion 80 that extends from bus bar71, a widened portion 79, a body portion 78, and an end portion 75. Boththe end portion 75 and the widened portion 79 are wider than the otherportions of the finger 77. The widened portion 79 and the end portion 75of the finger 73 are included in border regions on opposing sides of theactive region of the acoustic wave resonator that includes the IDTelectrode 76. The end portions and widened portions of the fingers ofthe IDT electrode 76 are piston mode structures.

FIG. 12C illustrates a portion of an IDT electrode 81 of an acousticwave resonator according to another embodiment. The IDT electrode 81includes fingers having hammer head shaped end portions and bus barshaving extension portions adjacent to the end portions of the fingers.The IDT electrode 81 is like the IDT electrode 70 of FIG. 12A exceptthat the bus bars of the IDT electrode 81 have extension portionsadjacent to end portions of fingers. Bus bars 82 and 83 each includeextension portions, such as extension portion 84, adjacent to endportions of fingers of the IDT electrode 81. The Extension portions ofthe bus bars 82 and 83 can increase the metal coverage ratio around theborder regions relative to the central portion of the active region ofthe acoustic wave resonator. The end portions of the finger andextension portions of the bus bars of the IDT electrode 81 are pistonmode structures.

FIG. 12D illustrates a portion of an IDT electrode 85 of an acousticwave resonator according to another embodiment. The IDT electrode 85 hasthicker end portions on border regions of each finger and bus barshaving extension portions adjacent to end portions of the fingers. TheIDT electrode 85 includes features of the IDT electrode 81 of FIG. 12Cand the IDT electrode 76 of FIG. 12B.

FIG. 12E illustrates a portion of an IDT electrode 86 of an acousticwave resonator according to another embodiment. The IDT electrode 86includes fingers having thicker end portions and thicker regionsextending from a bas bar toward a central portion of an active region ofthe acoustic wave resonator. The IDT electrode 86 is similar to the IDTelectrode 81 of FIG. 12C except the fingers of IDT electrode 86 includea widened portion extending from bus bars. As shown in FIG. 12E, finger88 of the IDT electrode 86 includes widened portion 87 extending fromthe bus bar 82 to body portion 78. The finger 88 also includes endportion 75.

FIG. 12F illustrates a portion of an IDT electrode 90 of an acousticwave resonator according to another embodiment. The IDT electrode 90includes bus bars 92 and 94 and fingers 93 and 95 extending from therespective bus bars. The bus bars 92 and 94 have holes 96 and 97,respectively. The holes 96 and 97 are adjacent to ends of the fingers 95and 93, respectively. The holes 96 and 97 can reduce a metal coverageratio adjacent to border regions of the acoustic wave resonator. Theholes 96 and 97 are piston mode structures.

FIG. 12G illustrates a portion of an IDT electrode 100 of an acousticwave resonator according to another embodiment. The IDT electrode 100 islike the IDT electrode 90 of FIG. 12F except that the bus bars havedifferent holes. As illustrated in FIG. 12G, the IDT electrode 100includes bus bars 102 and 104 having holes 105, 106 and 107, 108,respectively.

FIG. 12H illustrates a portion of an IDT electrode 110 of an acousticwave resonator according to another embodiment. The IDT electrode 110includes bus bars 71 and 72 and fingers 112 and 115 extending from thebus bars 71 and 72, respectively. The finger 112 has thicker metal inborder region portions 113 and 114 that the rest of the finger 112.Similarly, the finger 114 has thicker metal in border region portions116 and 117 than in other portions of the finger 114. Thicker metal canprovide similar functionality as wider metal.

FIG. 12I illustrates a portion of an IDT electrode 120 of an acousticwave resonator according to an embodiment. The IDT electrode 120 has anoxide over border regions 122A and 122B of the IDT electrode 120. Theoxide can cause a magnitude of the velocity in the border regions to beless than the velocity in the central portion of the active region ofthe acoustic wave resonator. Any other suitable material can be includedover border regions 102A and 122B to reduce the magnitude of thevelocity of the border regions relative to the central portion of theactive region. The oxide can be silicon dioxide, for example.

FIG. 12J illustrates a portion of an IDT electrode 130 of an acousticwave resonator according to another embodiment. The IDT electrode 130has silicon nitride over a central portion 132 of the active region ofthe IDT electrode 130. The silicon nitride can cause a magnitude of thevelocity in the active region to be greater than the velocity in aborder region of the acoustic wave resonator. Any other suitablematerial can be included over the central portion 132 to of the activeregion increase the magnitude of the velocity of the central portion ofthe active region relative to the border regions. In some instances, atrench in silicon nitride or another suitable material overlying the IDTelectrode 130 can create a slower velocity border region.

Any suitable acoustic wave resonator with an IDT electrode can include abent structure to suppress a transverse mode. Such acoustic waveresonators include SAW resonators, TC-SAW resonators, SAW resonatorswith multi-layer piezoelectric substrates, Lamb wave resonators, andboundary wave resonators. Any suitable combination of features of bentresonators and/or best resonators with piston mode structure disclosedherein can be implemented in such an acoustic wave resonator. Crosssections of example acoustic wave resonators that can include curvaturein a waveguide of the acoustic wave resonator will be described withreference to FIGS. 13 to 17F.

FIG. 13 is a cross sectional view of a portion of a surface acousticwave resonator 140 according to an embodiment. The surface acoustic waveresonator 140 can include a bent section in accordance with any suitableprinciples and advantages disclosed herein. As illustrated, the surfaceacoustic wave resonator 140 includes a piezoelectric layer 142 and anIDT electrode 144 on the piezoelectric layer 142. The piezoelectriclayer 142 can be any suitable piezoelectric layer, such as a lithiumniobate layer, a lithium tantalate layer, or an aluminum nitride layer.The IDT electrode 144 can be in physical contact with the piezoelectriclayer 142 as illustrated. The IDT electrode 144 can include aluminum(Al) or any suitable alloy thereof. The IDT electrode 144 can includetwo or more conductive layers in some instances. Such an IDT electrode144 can include aluminum (Al) and another conductive layer such asmolybdenum (Mo), tungsten (W), gold (Au), silver (Ag), copper (Cu),platinum (Pt), ruthenium (Ru), titanium (Ti), or the like.

FIG. 14A is a cross sectional view of a portion of a temperaturecompensated surface acoustic wave resonator 145 according to anembodiment. The temperature compensated surface acoustic wave resonator145 can include a bent section in accordance with any suitableprinciples and advantages disclosed herein. As illustrated, thetemperature compensated surface acoustic wave resonator 140 includes apiezoelectric layer 142 and an IDT electrode 144 on the piezoelectriclayer 142, and a temperature compensation layer 146 over the IDTelectrode 144. The temperature compensated surface acoustic waveresonator 145 is like the surface acoustic wave resonator 140 of FIG. 13except that a temperature compensation layer 146 is over the IDTelectrode 144 in the temperature compensated surface acoustic waveresonator 145. The temperature compensation layer 146 can bring the TCFof the temperature compensated surface acoustic wave device 145 closerto zero than the TCF of the surface acoustic wave device 140. Thetemperature compensation layer 146 can have a positive TCF. This cancompensative for a negative TCF of the piezoelectric layer 142, aslithium niobate and lithium tantalate both have a negative TCF. Thetemperature compensation layer 142 can be a dielectric film. Thetemperature compensation layer 142 can be a silicon dioxide layer. Insome other embodiments, a different temperature compensation layer canbe implemented. Some examples of other temperature compensation layersinclude a tellurium dioxide (TeO₂) layer or a silicon oxyfluoride (SiOF)layer.

FIG. 14B is a cross sectional view of a portion of a temperaturecompensated surface acoustic wave resonator 148 according to anotherembodiment. The temperature compensated surface acoustic wave resonator148 can include a bent section in accordance with any suitableprinciples and advantages disclosed herein. The temperature compensatedsurface acoustic wave resonator 148 is like the temperature compensatedsurface acoustic wave resonator 145 of FIG. 14A except that a dispersionadjustment layer 149 is over the temperature compensation layer 146 inthe temperature compensated surface acoustic wave resonator 148. Thedispersion adjustment layer 149 can be a silicon nitride layer.

FIG. 15A is a cross sectional view of a portion of a surface acousticwave resonator 150 with a multi-layer piezoelectric substrate accordingto an embodiment. The surface acoustic wave resonator 150 is like thesurface acoustic wave resonator 140 of FIG. 13 except that thepiezoelectric layer 142 is over a carrier substrate 152 in the surfaceacoustic wave resonator 150. The surface acoustic wave resonator 150 caninclude a bent section in accordance with any suitable principles andadvantages disclosed herein. The carrier substrate 152 can be a siliconsubstrate, a quartz substrate, a sapphire substrate, a polycrystallinespinel substrate, a magnesium aluminum spinel, a ceramic substrate, aglass substrate, or any other suitable carrier substrate.

FIG. 15B is a cross sectional view of a portion of a surface acousticwave resonator 153 with a multi-layer piezoelectric substrate accordingto another embodiment. The surface acoustic wave resonator 153 is likethe surface acoustic wave resonator 150 of FIG. 15A except that adispersion adjustment layer 154 is included the surface acoustic wavedevice 155. The surface acoustic wave resonator 153 can include a bentsection in accordance with any suitable principles and advantagesdisclosed herein. The illustrated dispersion adjustment layer 154 ispositioned between the carrier substrate 152 and the piezoelectric layer142. The dispersion adjustment layer 154 can be a silicon nitride layer,a silicon dioxide layer, or any other suitable dispersion adjustmentlayer. In some instances, the dispersion adjustment layer 154 canincrease adhesion between layers. Alternatively or additionally, thedispersion adjustment layer 154 can provide temperature compensation tobring a TCF of the surface acoustic wave resonator 153 closer to zero.

FIG. 15C is a cross sectional view of a portion of a surface acousticwave resonator 155 with a multi-layer piezoelectric substrate accordingto another embodiment. The surface acoustic wave resonator 155 is likethe surface acoustic wave resonator 150 of FIG. 15A except that adispersion adjustment layer 156 is included the surface acoustic wavedevice 155. The surface acoustic wave resonator 155 can include a bentsection in accordance with any suitable principles and advantagesdisclosed herein. The illustrated dispersion adjustment layer 156 ispositioned over the IDT electrode 144. The dispersion adjustment layer156 can be a silicon nitride layer, a silicon dioxide layer, or anyother suitable dispersion adjustment layer.

FIG. 15D is a cross sectional view of a portion of a surface acousticwave resonator 158 with a multi-layer piezoelectric substrate accordingto another embodiment. The surface acoustic wave resonator 158 is likethe surface acoustic wave resonator 153 of FIG. 15B except that a seconddispersion adjustment layer 156 is included the surface acoustic wavedevice 158. The surface acoustic wave resonator 158 can include a bentsection in accordance with any suitable principles and advantagesdisclosed herein. In some instances, the dispersion adjustments layers154 and 156 can be the same material. The dispersion adjustment layers154 and 156 can be different materials in certain instances.

Any suitable principles and advantages disclosed herein can beimplemented in a Lamb wave resonator. A Lamb wave resonator can includean IDT electrode on a piezoelectric layer and reflective gratingsdisposed on the piezoelectric layer on opposing sides of the IDTelectrode. The reflective gratings can reflect acoustic waves induced bythe IDT electrode to form a resonant cavity in such resonators. Thereflective gratings can include a periodic pattern of metal on apiezoelectric layer. FIGS. 16A to 16F are diagrams of cross sections ofLamb wave resonators with gratings. These Lamb wave resonators can bebent resonators in accordance with any suitable principles andadvantages discussed herein. For example, a bent acoustic wave resonatorcan be implemented with any suitable principles and advantages of any ofthe acoustic wave resonators of FIGS. 16A to 16F. Although the Lamb waveresonators of FIGS. 16A to 16F are free-standing resonators, anysuitable principles and advantages of these Lamb wave resonators can beapplied to any other suitable acoustic wave resonators.

FIG. 16A illustrates a Lamb wave resonator 160 that includes an IDTelectrode 162, gratings 163 and 164, a piezoelectric layer 165, and anelectrode 166. The IDT electrode 162 is on the piezoelectric layer 165.In the illustrated cross section, alternate ground and signal metals areincluded in the IDT electrodes. Gratings 163 and 165 are on thepiezoelectric layer 165 and disposed on opposing sides of the IDTelectrode 162. The illustrated gratings 163 and 165 are shown as beingconnected to ground. Alternatively, one or more of the gratings can besignaled and/or floating. The electrode 166 and the IDT electrode 162are on opposite sides of the piezoelectric layer 165. The piezoelectriclayer 165 can be aluminum nitride (AlN), for example. The electrode 166can be grounded.

FIG. 16B illustrates a Lamb wave resonator 160′. The Lamb wave resonator160′ is like the Lamb wave resonator 160 of FIG. 16A except that theLamb wave resonator 160′ includes a floating electrode 166′.

FIG. 16C illustrates a Lamb wave resonator 160″ without an electrode ona side of the piezoelectric layer 165 that opposes the IDT electrode162.

FIG. 16D illustrates a Lamb wave resonator 161′″ that includes an IDTelectrode 167 and gratings 168 and 169 on a second side of thepiezoelectric layer 165 that is opposite to a first side on which theIDT electrode 162 and gratings 163 and 164 are disposed. The signal andground electrodes are offset relative to each other for the IDTelectrodes 162 and 167.

FIG. 16E illustrates a Lamb wave resonator 160″″ that includes an IDTelectrode 167′ and gratings 168 and 169 on a second side of thepiezoelectric layer 165 that is opposite to a first side on which theIDT electrode 162 and gratings 163 and 164 are disposed. The signal andground electrodes are aligned with each other for the IDT electrodes 162and 167′.

FIG. 16F illustrates a Lamb wave resonator 160″″′ that includes an IDTelectrode 167″ and gratings 168 and 169 on a second side of thepiezoelectric layer 165 that is opposite to a first side on which theIDT electrode 162′ and gratings 163 and 164 are disposed. In theillustrated cross section, the IDT electrode 162′ includes only signalelectrodes and the IDT electrode 167″ includes only ground electrodes.

Lamb wave resonators can include an IDT electrode with free edges.Suspended free edges of a piezoelectric layer can provide acoustic wavereflection to form a resonant cavity in such resonators. FIGS. 17A to17F are diagrams of cross sections of Lamb wave resonators with freeedges. These Lamb wave resonators can be bent resonators in accordancewith any suitable principles and advantages discussed herein. Forexample, a bent acoustic wave resonator can be implemented with anysuitable principles and advantages of any of the acoustic waveresonators of FIGS. 17A to 17F. Although the Lamb wave resonators ofFIGS. 17A to 17F are free-standing resonators, any suitable principlesand advantages of these Lamb wave resonators can be applied to othersuitable acoustic wave resonators.

FIG. 17A illustrates a Lamb wave resonator 170 that includes IDTelectrode 162, piezoelectric layer 165, and electrode 166. The IDTelectrode 162 is on the piezoelectric layer 165. In the illustratedcross section, alternate ground and signal electrodes are included inthe IDT electrodes. The piezoelectric layer 165 has free edges onopposing sides of the IDT electrode 162. The electrode 166 and the IDTelectrode 162 are on opposite sides of the piezoelectric layer 165. Thepiezoelectric layer 165 can be aluminum nitride, for example. Theelectrode 166 can be grounded.

FIG. 17B illustrates a Lamb wave resonator 170′. The Lamb wave resonator170′ is like the Lamb wave resonator 170 of FIG. 17A except that theLamb wave resonator 170′ includes a floating electrode 166′.

FIG. 17C illustrates a Lamb wave resonator 170″ without an electrode ona side of the piezoelectric layer 165 that opposes the IDT electrode162.

FIG. 17D illustrates a Lamb wave resonator 170′″ that includes an IDTelectrode 167 on a second side of the piezoelectric layer 165 that isopposite to a first side on which the IDT electrode 162 is disposed. Thesignal and ground electrodes are offset relative to each other for theIDT electrodes 162 and 167.

FIG. 17E illustrates a Lamb wave resonator 170″″ that includes an IDTelectrode 167′ on a second side of the piezoelectric layer 165 that isopposite to a first side on which the IDT electrode 162 is disposed. Thesignal and ground electrodes are aligned with each other for the IDTelectrodes 162 and 167′.

FIG. 17F illustrates a Lamb wave resonator 170″″′ that includes an IDTelectrode 167″ on a second side of the piezoelectric layer 165 that isopposite to a first side on which the IDT electrode 162′ is disposed. Inthe illustrated cross section, the IDT electrode 162′ includes onlysignal electrodes and the IDT electrode 167″ includes only groundelectrodes.

An acoustic wave device, such as a SAW resonator, including any suitablecombination of features disclosed herein be included in a filterarranged to filter a radio frequency signal in a fifth generation (5G)New Radio (NR) operating band within Frequency Range 1 (FR1). A filterarranged to filter a radio frequency signal in a 5G NR operating bandcan include one or more bent SAW resonators disclosed herein. FR1 can befrom 410 megahertz (MHz) to 7.125 gigahertz (GHz), for example, asspecified in a current 5G NR specification. One or more bent acousticwave resonators in accordance with any suitable principles andadvantages disclosed herein can be included in a filter arranged tofilter a radio frequency signal in a 4G LTE operating band and/or in afilter having a passband that includes a 4G LTE operating band and a 5GNR operating band.

A method of filtering a radio frequency signal includes providing theradio frequency signal to an acoustic wave filter that includes a bentacoustic wave resonator. The bent acoustic wave resonator can beimplemented in accordance with any suitable principles and advantagesdisclosed herein. The acoustic wave filter can include any suitablenumber of bent acoustic wave resonators. The method includes filteringthe radio frequency signal with the acoustic wave filter. The methodalso includes during the filtering, suppressing a transverse spuriousmode of the bent acoustic wave resonator. The bent acoustic waveresonator includes a bent section arranged to create a curvature in awaveguide of the bent acoustic wave resonator to thereby suppress thetransverse spurious mode.

FIG. 18 is a schematic diagram of an example transmit filter 180 thatincludes acoustic wave resonators according to an embodiment. Thetransmit filter 180 can be a band pass filter. The illustrated transmitfilter 180 is arranged to filter a radio frequency signal received at atransmit port TX and provide a filtered output signal to an antenna portANT. The transmit filter 180 includes series SAW resonators TS1, TS2,TS3, TS4, TS5, TS6, and TS7, shunt SAW resonators TP1, TP2, TP3, TP4,and TP5, series input inductor L1, and shunt inductor L2. Some or all ofthe acoustic wave resonators TS1 to TS7 and/or TP1 to TP5 can be bentacoustic wave resonators in accordance with any suitable principles andadvantages disclosed herein. Some or all of the acoustic wave resonatorsTS1 to TS7 and/or TP1 to TP5 can be bent acoustic wave resonators with apiston mode structure in accordance with any suitable principles andadvantages disclosed herein. Any suitable number of series acoustic waveresonators and shunt acoustic wave resonators can be included in atransmit filter 180. Such acoustic wave resonators can be TC-SAWresonators in certain applications.

Bent shunt acoustic wave resonators can contribute more to transversemode suppression than bent series acoustic wave resonators in thetransmit filter 180. Accordingly, in a transmit filter in which a subsetof the acoustic wave resonators is bent, the bent acoustic waveresonator(s) can be shunt acoustic wave resonator(s). The shunt acousticwave resonators TP1 and TP5 closest to the input and output ports,respectively, of the transmit filter 180 can have the largest impact ontransverse mode suppression. Accordingly, making the acoustic waveresonators TP1 and TP5 bent acoustic wave resonators can have thelargest impact on transverse mode suppression in such instances.

FIG. 19 is a schematic diagram of a receive filter 190 that includesacoustic wave resonators according to an embodiment. The receive filter190 can be a band pass filter. The illustrated receive filter 190 isarranged to filter a radio frequency signal received at an antenna portANT and provide a filtered output signal to a receive port RX. Thereceive filter 190 includes series SAW resonators RS1, RS2, RS3, RS4,RS5, RS6, RS7, and RS8, shunt SAW resonators RP1, RP2, RP3, RP4, andRP5, and RP6, shunt inductor L2, and series output inductor L3. Some orall of the acoustic wave resonators RS1 to RS8 and/or RP1 to RP6 can bebent acoustic wave resonators in accordance with any suitable principlesand advantages disclosed herein. Some or all of the acoustic waveresonators RS1 to RS8 and/or RP1 to RP6 can be bent acoustic waveresonators with a piston mode structure in accordance with any suitableprinciples and advantages disclosed herein. Any suitable number ofseries acoustic wave resonators and shunt acoustic wave resonators canbe included in a receive filter 190. Such acoustic wave resonators canbe TC-SAW resonators in certain applications.

Bent shunt acoustic wave resonators can contribute more to transversemode suppression than bent series acoustic wave resonators in thereceive filter 190. Accordingly, in a receive filter 190 in which asubset of the acoustic wave resonators is bent, the bent acoustic waveresonator(s) can be shunt acoustic wave resonator(s). The shunt acousticwave resonators RP6 and RP1 closest to the input and output ports,respectively, of the receive filter 190 can have the largest impact ontransverse mode suppression. Accordingly, making the acoustic waveresonators RP1 and RP6 bent acoustic wave resonators can have thelargest impact on transverse mode suppression in such instances.

The acoustic wave devices disclosed herein can be implemented in avariety of packaged modules. A module that includes a radio frequencycomponent can be referred to as a radio frequency module. Example radiofrequency modules will now be described in which any suitable principlesand advantages of the acoustic wave devices disclosed herein can beimplemented. A radio frequency module can include one or more featuresof any of the radio frequency modules of FIG. 20 and/or the radiofrequency module of FIG. 21.

FIG. 20 is a schematic diagram of a radio frequency module 200 thatincludes an acoustic wave component 202 according to an embodiment. Theillustrated radio frequency module 200 includes the acoustic wavecomponent 202 and other circuitry 203. The acoustic wave component 202can include one or more bent acoustic wave resonators with any suitablecombination of features of the acoustic wave resonators disclosedherein. The acoustic wave component 202 can include an acoustic wave diethat includes acoustic wave resonators. For example, the acoustic wavecomponent 202 can include a SAW die that includes SAW resonators.

The acoustic wave component 202 shown in FIG. 20 includes a filter 204and terminals 205A and 205B. The filter 204 includes acoustic waveresonators. One or more of the acoustic wave resonators can beimplemented in accordance with any suitable principles and advantages ofthe bent acoustic wave resonators disclosed herein. The terminals 205Aand 204B can serve, for example, as an input contact and an outputcontact. The acoustic wave component 202 and the other circuitry 203 areon a common packaging substrate 206 in FIG. 20. The package substrate206 can be a laminate substrate. The terminals 205A and 205B can beelectrically connected to contacts 207A and 207B, respectively, on thepackaging substrate 206 by way of electrical connectors 208A and 208B,respectively. The electrical connectors 208A and 208B can be bumps orwire bonds, for example.

The other circuitry 203 can include any suitable additional circuitry.For example, the other circuitry can include one or more one or morepower amplifiers, one or more radio frequency switches, one or moreadditional filters, one or more low noise amplifiers, one or more RFcouplers, one or more delay lines, one or more phase shifters, the like,or any suitable combination thereof. The radio frequency module 200 caninclude one or more packaging structures to, for example, provideprotection and/or facilitate easier handling of the radio frequencymodule 200. Such a packaging structure can include an overmold structureformed over the packaging substrate 206. The overmold structure canencapsulate some or all of the components of the radio frequency module200.

FIG. 21 is a schematic diagram of a radio frequency module 210 thatincludes an acoustic wave component according to an embodiment. Asillustrated, the radio frequency module 210 includes duplexers 212A to212N that include respective transmit filters 213A1 to 213N1 andrespective receive filters 213A2 to 213N2, a power amplifier 214, aselect switch 215, and an antenna switch 216. The radio frequency module210 can include a package that encloses the illustrated elements. Theillustrated elements can be disposed on a common packaging substrate206. The packaging substrate 206 can be a laminate substrate, forexample. A radio frequency module that includes a power amplifier can bereferred to as a power amplifier module. A radio frequency module caninclude a subset of the elements illustrated in FIG. 21 and/oradditional elements.

The duplexers 212A to 212N can each include two acoustic wave filterscoupled to a common node. The two acoustic wave filters can be atransmit filter and a receive filter. As illustrated, the transmitfilter and the receive filter can each be a band pass filter arranged tofilter a radio frequency signal. One or more of the transmit filters213A1 to 213N1 can include one or more bent acoustic wave resonators inaccordance with any suitable principles and advantages disclosed herein.Similarly, one or more of the receive filters 213A2 to 213N2 can includeone or more acoustic wave resonators in accordance with any suitableprinciples and advantages disclosed herein. Although FIG. 21 illustratesduplexers, any suitable principles and advantages disclosed herein canbe implemented in other multiplexers (e.g., quadplexers, hexaplexers,octoplexers, etc.) and/or in switch-plexers.

The power amplifier 214 can amplify a radio frequency signal. Theillustrated switch 215 is a multi-throw radio frequency switch. Theswitch 215 can electrically couple an output of the power amplifier 214to a selected transmit filter of the transmit filters 213A1 to 213N1. Insome instances, the switch 215 can electrically connect the output ofthe power amplifier 214 to more than one of the transmit filters 213A1to 213N1. The antenna switch 216 can selectively couple a signal fromone or more of the duplexers 212A to 212N to an antenna port ANT. Theduplexers 212A to 212N can be associated with different frequency bandsand/or different modes of operation (e.g., different power modes,different signaling modes, etc.).

FIG. 22A is a schematic diagram of a wireless communication 220 devicethat includes filters 223 in a radio frequency front end 222 accordingto an embodiment. The filters 223 can include one or more bent acousticwave resonators in accordance with any suitable principles andadvantages discussed herein. The wireless communication device 220 canbe any suitable wireless communication device. For instance, a wirelesscommunication device 220 can be a mobile phone, such as a smart phone.As illustrated, the wireless communication device 220 includes anantenna 221, an RF front end 222, a transceiver 224, a processor 225, amemory 226, and a user interface 227. The antenna 221 can transmit RFsignals provided by the RF front end 222. Such RF signals can includecarrier aggregation signals. The antenna 221 can receive RF signals andprovide the received RF signals to the RF front end 222 for processing.

The RF front end 222 can include one or more power amplifiers, one ormore low noise amplifiers, one or more RF switches, one or more receivefilters, one or more transmit filters, one or more duplex filters, oneor more multiplexers, one or more frequency multiplexing circuits, thelike, or any suitable combination thereof. The RF front end 222 cantransmit and receive RF signals associated with any suitablecommunication standards. The filters 223 can include one or more bentacoustic wave resonators that include any suitable combination offeatures discussed with reference to any embodiments discussed above.

The transceiver 224 can provide RF signals to the RF front end 222 foramplification and/or other processing. The transceiver 224 can alsoprocess an RF signal provided by a low noise amplifier of the RF frontend 222. The transceiver 224 is in communication with the processor 225.The processor 225 can be a baseband processor. The processor 225 canprovide any suitable base band processing functions for the wirelesscommunication device 220. The memory 226 can be accessed by theprocessor 225. The memory 226 can store any suitable data for thewireless communication device 220. The user interface 227 can be anysuitable user interface, such as a display with touch screencapabilities.

FIG. 22B is a schematic diagram of a wireless communication device 230that includes filters 223 in a radio frequency front end 222 and secondfilters 233 in a diversity receive module 232. The wirelesscommunication device 230 is like the wireless communication device 220of FIG. 22A, except that the wireless communication device 230 alsoincludes diversity receive features. As illustrated in FIG. 22B, thewireless communication device 230 includes a diversity antenna 231, adiversity module 232 configured to process signals received by thediversity antenna 231 and including filters 233, and a transceiver 234in communication with both the radio frequency front end 222 and thediversity receive module 232. The filters 233 can include one or morebent acoustic wave resonators that include any suitable combination offeatures discussed with reference to any embodiments discussed above.

Although embodiments are discussed with reference to certain acousticwave resonators, any suitable principles and advantages disclosed hereincan be applied to any other suitable acoustic wave resonators, such asboundary acoustic wave resonators.

Any of the embodiments described above can be implemented in mobiledevices such as cellular handsets. The principles and advantages of theembodiments can be used for any systems or apparatus, such as any uplinkcellular device, that could benefit from any of the embodimentsdescribed herein. The teachings herein are applicable to a variety ofsystems. Although this disclosure includes some example embodiments, theteachings described herein can be applied to a variety of structures.Any of the principles and advantages discussed herein can be implementedin association with RF circuits configured to process signals having afrequency in a range from about 30 kHz to 300 GHz, such as a frequencyin a range from about 450 MHz to 8.5 GHz.

Aspects of this disclosure can be implemented in various electronicdevices. Examples of the electronic devices can include, but are notlimited to, consumer electronic products, parts of the consumerelectronic products such as die and/or acoustic wave filter assembliesand/or packaged radio frequency modules, uplink wireless communicationdevices, wireless communication infrastructure, electronic testequipment, etc. Examples of the electronic devices can include, but arenot limited to, a mobile phone such as a smart phone, a wearablecomputing device such as a smart watch or an ear piece, a telephone, atelevision, a computer monitor, a computer, a modem, a hand-heldcomputer, a laptop computer, a tablet computer, a personal digitalassistant (PDA), a microwave, a refrigerator, an automobile, a stereosystem, a DVD player, a CD player, a digital music player such as an MP3player, a radio, a camcorder, a camera, a digital camera, a portablememory chip, a washer, a dryer, a washer/dryer, a peripheral device, awrist watch, a clock, etc. Further, the electronic devices can includeunfinished products.

Unless the context clearly requires otherwise, throughout thedescription and the claims, the words “comprise,” “comprising,”“include,” “including” and the like are to be construed in an inclusivesense, as opposed to an exclusive or exhaustive sense; that is to say,in the sense of “including, but not limited to.” The word “coupled”, asgenerally used herein, refers to two or more elements that may be eitherdirectly connected, or connected by way of one or more intermediateelements. Likewise, the word “connected”, as generally used herein,refers to two or more elements that may be either directly connected, orconnected by way of one or more intermediate elements. Additionally, thewords “herein,” “above,” “below,” and words of similar import, when usedin this application, shall refer to this application as a whole and notto any particular portions of this application. Where the contextpermits, words in the above Detailed Description using the singular orplural number may also include the plural or singular numberrespectively. The word “or” in reference to a list of two or more items,that word covers all of the following interpretations of the word: anyof the items in the list, all of the items in the list, and anycombination of the items in the list.

Moreover, conditional language used herein, such as, among others,“can,” “could,” “might,” “may,” “e.g.,” “for example,” “such as” and thelike, unless specifically stated otherwise, or otherwise understoodwithin the context as used, is generally intended to convey that certainembodiments include, while other embodiments do not include, certainfeatures, elements and/or states. Thus, such conditional language is notgenerally intended to imply that features, elements and/or states are inany way required for one or more embodiments.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the disclosure. Indeed, the novel apparatus, methods, andsystems described herein may be embodied in a variety of other forms;furthermore, various omissions, substitutions and changes in the form ofthe methods and systems described herein may be made without departingfrom the spirit of the disclosure. For example, while blocks arepresented in a given arrangement, alternative embodiments may performsimilar functionalities with different components and/or circuittopologies, and some blocks may be deleted, moved, added, subdivided,combined, and/or modified. Each of these blocks may be implemented in avariety of different ways. Any suitable combination of the elements andacts of the various embodiments described above can be combined toprovide further embodiments. The accompanying claims and theirequivalents are intended to cover such forms or modifications as wouldfall within the scope and spirit of the disclosure.

What is claimed is:
 1. An acoustic wave device comprising: apiezoelectric layer; an interdigital transducer electrode on thepiezoelectric layer, the interdigital transducer electrode including abus bar and fingers extending from the bus bar, the interdigitaltransducer electrode creating a curvature in an acoustic aperture of theacoustic wave device; and a piston mode structure.
 2. The acoustic wavedevice of claim 1 wherein the interdigital transducer includes a bentsection, and the fingers include inner fingers positioned between twoouter fingers in the bent section, and the bent section has a bend anglebetween intersecting lines extending from outer edges of the two outerfingers.
 3. The acoustic wave device of claim 2 wherein the bend angleis in a range from 1° to 20°.
 4. The acoustic wave device of claim 2wherein the bend angle is in a range from 10° to 20°.
 5. The acousticwave device of claim 1 wherein the piston mode structure includes an endportion of at least one of the fingers, and the end portion includeswider metal than other portions of the at least one of the fingers. 6.The acoustic wave device of claim 1 wherein the piston mode structureincludes an end portion of at least one of the fingers, and the endportion includes thicker metal than other portions of the at least oneof the fingers.
 7. The acoustic wave device of claim 1 wherein thepiston mode structure includes an oxide over an end portion of at leastone of the fingers.
 8. The acoustic wave device of claim 1 wherein thepiston mode structure includes a trench in a dispersion adjustment layerover the interdigital transducer electrode.
 9. The acoustic wave deviceof claim 1 wherein the bus bar includes an arcuate section and astraight section.
 10. The acoustic wave device of claim 1 furthercomprising a temperature compensation layer over the interdigitaltransducer electrode, and the acoustic wave device is configured togenerate a surface acoustic wave.
 11. The acoustic wave device of claim1 further comprising a carrier substrate, the piezoelectric layerpositioned over the carrier substrate.
 12. A wireless communicationdevice comprising: an acoustic wave filter including an acoustic waveresonator, the acoustic wave resonator including a piezoelectric layer,an interdigital transducer electrode on the piezoelectric layer, and apiston mode structure, the interdigital transducer electrode creating acurvature in an acoustic aperture of the acoustic wave resonator; and anantenna in communication with the acoustic wave filter.
 13. The wirelesscommunication device of claim 12 wherein the wireless communicationdevice is a mobile phone.
 14. An acoustic wave device comprising: apiezoelectric layer; and an interdigital transducer electrode on thepiezoelectric layer, the interdigital transducer electrode including abent section arranged to create a curvature in an acoustic aperture ofthe acoustic wave device to suppress a transverse mode of the acousticwave device.
 15. The acoustic wave device of claim 14 further comprisinga piston mode structure.
 16. The acoustic wave device of claim 14wherein the interdigital transducer electrode includes a bus bar andfingers in the bent section extending from the bus bar, the fingers inthe bent section including inner fingers positioned between two outerfingers, and the bent section having a bend angle between intersectinglines extending from outer edges of the two outer fingers.
 17. Theacoustic wave device of claim 16 wherein the bend angle is in a rangefrom 1° to 20°.
 18. The acoustic wave device of claim 16 wherein thebend angle is in a range from 10° to 20°.
 19. The acoustic wave deviceof claim 14 further comprising a temperature compensation layer over theinterdigital transducer electrode.
 20. The acoustic wave device of claim19 wherein the piezoelectric layer includes lithium niobate.